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MEMSnet Home: MEMS-Talk: Anisotropic Cu Wet etching
Anisotropic Cu Wet etching
2003-04-26
HE,Han-Johnny
2003-05-02
David Nemeth
Anisotropic Cu Wet etching
HE,Han-Johnny
2003-04-26
Hi,
Is there anyone know which etchant is the best one for anisotropic Cu
wet etching or any similar way in good control of Cu good sidewall
definition in terms of wet etching? How to control the etch rate?

I am using Al etchant, but it does not works very well.

Thanks.

Johnny


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