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MEMSnet Home: MEMS-Talk: Bonding PDMS to SU-8
Bonding PDMS to SU-8
2003-04-29
frank berisford
Bonding PDMS to SU-8
frank berisford
2003-04-29
Hello all,

Recently I've constructed some flow channels in SU-8 and would like to bond
PDMS to the SU-8.  I've had success in bonding PDMS to glass using an oxygen
plasma (50 Watts RF, 40sccm O2, 60mTorr, 5 minutes) and I tried the same recipe
for PDMS to SU-8 but it didn't work.

I was wondering if anyone else has tried this or could offer some suggestions.


Thank you,
Frank Berisford

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