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MEMSnet Home: MEMS-Talk: tooling for HF release etch
Contact angle between water and silicon or silica
2003-04-24
Danny Klein
2003-04-25
Gautham V
2003-04-24
Bill Moffat
2003-04-24
Phillipe Tabada
tooling for HF release etch
2003-04-29
Robert Dean
2003-04-29
Mighty Platypus
2003-04-29
Kirt & Erika Zipf-Williams
tooling for HF release etch
Mighty Platypus
2003-04-29
Hi Robert,
You can find that sort of thing at http://www.wafercare.com/, the
Fluoroware website of Entegris. I saw a ladle at

http://www.wafercare.com/Default.asp?G=67

that may be just the thing you're looking for.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Observations of nature, no matter how seemingly arcane, are like
peeling off one more layer from the great onion of knowledge"
    -- Don Petit, ISS science officer

On Mon, 28 Apr 2003, Robert Dean wrote:

>
> >Hello,
>
> I am looking for a ladle-like tool or small "bucket" for transferring die
> to and from, and to hold them in a beaker of HF for a standard SOI MEMS
> process release etch.  Any suggestions on what and where to purchase it?
>
> Sincerely,
>
> Robert Dean
>
>
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