An introduction to surface profilometry and surface roughness measurement can
be found in the paperback: "Introduction to surface roughness and scattering"
by Jean Bennett and Lars Mattsson, Optical Society of America, Washington, D.
C., 1989. (ISBN 1-55752-108-5). This book includes a description of both
optical and contact profilometers, and describes the limitations and use of
many different instruments, including the Chapman MP2000 (p. 18).