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MEMSnet Home: MEMS-Talk: critical point drying
critical point drying
1997-08-21
Jeffrey M. Melzak
critical point drying
Jeffrey M. Melzak
1997-08-21
I am working with an equipment supplier to determine the worthiness
of developing a critical point (CO2) dryer for the surface
micromachining community.  The supplier currently makes CPDs with
small chambers, primarily for use in drying sensitive biological
samples.

Thus, I would like to take an informal survey to determine the
level of interest in a CPD capable of drying a full 4" or 6"
wafer that would cost in the neighborhood of $15K.  Useful feedback
would include:  application (R&D, prototyping, or production),
wafer size(s) of interest, desired throughput, desired level of
automation, etc.

Thanks in advance for your interest.

        Jeff Melzak
        Microfabrication Lab Manager
        Case Western Reserve University


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