.Hello Bobo,
try pad etch, it works well. There are mixtures with BOE / ethylenglycol/ water
(my mixture contents 210 ml ethylenglycol, 370 ml BOE 7:1 and 430 ml
water).There are also mixtures with acetic acid. Ask your supplier for
chemicals, if they have pad etch.
good luck
Anke

> -----Original Message-----
> From: [email protected] [mailto:[email protected]]On
> Behalf Of bobo
> Sent: Thursday, May 15, 2003 6:31 AM
> To: [email protected]
> Subject: [mems-talk] Etching SiO2 without affecting Aluminum
>
>
> Dear all,
> does anyone knows what wet etchant can etching silicon dioxide without
> etching aluminum at the same time?   Thanks.
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