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MEMSnet Home: MEMS-Talk: Conductive polymer for excimer laser micromachining
Conductive polymer for excimer laser micromachining
2003-05-20
sou zou
Conductive polymer for excimer laser micromachining
sou zou
2003-05-20
Hi fellas,
I wonder if someone have heard or has got any idea about a conductive polymer
micromachining application. In fact, the principle stems from the SOI machining
using DRIE. We have got an excimer laser machine and would like to make some
simple samples using some conductive Polymers-On-Insulators for example...
Many thanks for your help,
Sofiane



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