Hot photoresist remover (1165 or alike) works fine with me..

> -----Original Message-----
> From: K.L.Zheng [SMTP:zhengkl@mail.ustc.edu.cn]
> Sent: Tuesday, June 03, 2003 00:35
> To:   mems-talk@memsnet.org
> Cc:   zhengkl@mail.ustc.edu.cn
> Subject:      [mems-talk] CrystalBond Stripper
>
> Hello everybody:
>        We used CrystalBondTM509 as the glue between quartz and silicon
> during the anisotropic etching of silicon in 75°C KOH solution. After
> about 2 hours anisotropic etching, most glue can be remove in acetone
> which is protected. But, Some CrystalBond509 ,which is exposed to the
> KOH solution, can't be removed completely.  This residues are very
> unwelcoming in the following process.
> Does anyone have experiences about the stripping of CrystalBond 509? Any
> suggestion are appreciated.
>
> =======================================
>                      Mr. K.L.Zheng
>  Dept. of Precision Machinery and Precision Instrumentation
>  University of Science and Technology of China
>  Hefei, Anhui Province, 230027,  P.R.China
>  E-Mail: zhengkl@mail.ustc.edu.cn 
>
>  Tel: +86-551-3607405  Fax: +86-551-3607504
> =======================================
>
>
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