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MEMSnet Home: MEMS-Talk: Re: dry etching if TiNi.
Re: dry etching if TiNi.
1997-09-10
YANG Eui Hyeok
1997-09-19
Alexander Holke
Re: dry etching if TiNi.
YANG Eui Hyeok
1997-09-10
Dear Gupta
We are using a lift-off process for TiNi film.  If you are interested in
this, let me know.

Regards,

E.H.


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