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MEMSnet Home: MEMS-Talk: Dimple Size in RF MEMS Series Switch.
Dimple Size in RF MEMS Series Switch.
2003-06-05
이태원
Dimple Size in RF MEMS Series Switch.
이태원
2003-06-05
Hi. All.

I'm trying to make simple RF MEMS series switch (cantilerver type).

During the process , I can't determine the size of contact dimple . RF signal
line width is about 40um , and I think two 10*10um (100um^2) dimples on the end
of cantilever beam are good.

To prevent metal-to-metal stictiob and signal loss , what size of dimple is
proper one?

Thank you.
TW Lee.


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