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MEMSnet Home: MEMS-Talk: Anodic bonding glass+aluminum+glass
Anodic bonding glass+aluminum+glass
2003-06-10
gayathri@eng.auburn.edu
Anodic bonding glass+aluminum+glass
gayathri@eng.auburn.edu
2003-06-10
Hi all,
I am trying to bond 1 micron thick aluming deposited on a  700 micron borofloat
glass to another glass wafer using anoding bonding technique.  I tried bonding
at 350C and 700 V , but it did not work.If anybody has done anything similar
and has any suggestions on the technique will be greatly appreciated.
Thanks
Gayathri


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