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MEMSnet Home: MEMS-Talk: KOH Solution and Gold --- Problems ?
KOH Solution and Gold --- Problems ?
1997-09-19
Ken Westra
KOH Solution and Gold --- Problems ?
Ken Westra
1997-09-19
Hi,

  I recently read an oblique reference to a problem with gold
contamination of KOH and TMAH etchants used in anisotropic etching.
Does anyone have a idea what the problem is ?

  Thanks,
     Ken Westra

Ken Westra PhD
Staff Scientist

Alberta Microelectronic Centre
# 318 11315 87 Ave
Edmonton Alberta Canada
T6G 2T9

Phone: 403 492 5570 ext 234
Fax:   403 492 1643


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