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MEMSnet Home: MEMS-Talk: Si or Ag Sputtering after Ag Etching
Si or Ag Sputtering after Ag Etching
2003-06-22
Bing Yu
Si or Ag Sputtering after Ag Etching
Bing Yu
2003-06-22
I encountered a strange problem when I was trying to sputter Si or Silver thin
films on to a 0211 glass wafer where silver was removed by wet etching(ammonim
hydroxide plus hyrogen peroxide). I haven't seen any films over the area where
the Ag was removed after enough time of deposition. I not sure whether it is
because of the wafer is not clean or something else was left on the wafer during
the wet etching. Is there anybody have the same experience?
Thanks

Bing



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