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MEMSnet Home: MEMS-Talk: Re: dry etching if TiNi.
Re: dry etching if TiNi.
1997-09-10
YANG Eui Hyeok
1997-09-19
Alexander Holke
Re: dry etching if TiNi.
Alexander Holke
1997-09-19
>
>  Hi Colleagues,
>
>  I am looking for any information on
>  "dry etching of TiNi(Shape Memory Alloy)".
>
>  Any information will be appreciated.
>
>  Thanks.
>
>  Vikas Gupta
>
>


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