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MEMSnet Home: MEMS-Talk: Al safe Ti(N)-W etchant
Al safe Ti(N)-W etchant
1997-09-12
Erik Jung
Al safe Ti(N)-W etchant
Erik Jung
1997-09-12
Hello there!

I am looking for a Al-safe etchant to remove a Ti(N)-W plating base from
the bond pad. Any suggestions?

Thanks in advance,

Erik Jung
FhG-IZM
http://www.izm.fhg.de/cvt/


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