Use argon at low pressure and high RF power in an RIE.  This will give the
argon atoms a significant energy, and they will remove the gold via a
physical process.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of mike lin
Sent: Thursday, June 26, 2003 7:18 AM
To: General MEMS discussion
Subject: [mems-talk] Gold residue


Dear All,

      They said that gold is hard to remove by dry etch but I have to.

Could anyone share your experience about ashing gold residue?

The gases I got are CF4,O2 and N2. Are these gases useful?

Or any else gas I should use?

Thanks for attention.


Mike Lin


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