Hello MEMS community,

I am looking for a spin recipie that
will give me a resist thickness of > 13 microns. I use
Clariant
resists AZ4620 and AZ 9260.

This is for a protective backside  coating so I will not
expose or develop it. I need to hard bake the resist
sufficiently so that it survives for over 1 hour in SF6
plasma. However the resist side will face the bottom of the
chamber & not the plasma

I would grately appreciate if any of you could give me a
spin
recipie for the above requirement with these two resists
AZ4620 or AZ 9260 in terms of

Spread: rpm, r/s to reach the reqd rpm, time of spin at the
rpm
Level: rpm, r/s to reach the reqd rpm, time of spin at the
rpm

I look forward to hearing from you at the earliest.

Thank you for the help

Sincerely

Anupama