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MEMSnet Home: MEMS-Talk: Etching and Bonding Sapphire ...
Etching and Bonding Sapphire ...
2003-07-11
Danny Klein
2003-07-11
Mario Robles
Etching and Bonding Sapphire ...
Danny Klein
2003-07-11
Dear members,

I would like to etch V-grooves or rectangle microchannels on a Sapphire plate
and then bond the plate to another one.
Doe's anybody have an idea if it is possible to etch Sapphire at all and then
bond it to another one?

If it's possible, could you refer me to an article or recommend the proper
etching materials to use and the procedure for bonding the two Sapphire plates
together?

Thank you in advance,

Danny Klein.
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Danny Klein
Faculty of Mechanical Engineering
Technion, Israel Institute of Technology
Haifa, 32000
Israel

Tel (Lab.): 972-4-8292946(3861)
Email: [email protected]

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