Dear Deepti

If the pyrex is below the SU-8 layer it shouldn't affect your
patterning; we regularly use borosilicate glass (such as cover glasses)
as substrates. If you need to expose through the glass, you will need a
glass that does not absorb UV, such as fused silica or quartz. The
substrates will need to be clean, flat and polished.

Could you describe what's gone wrong in greater detail if this doesn't
solve the problem?

Chris

On Thursday, July 10, 2003, at 07:47  pm, Deepti Terala wrote:

> hi,
> I need to make SU8 micropatterns on glass substrate.  I used Pyrex
> glass to
> pattern SU8 but it was  of no use as it scattered UV light. please
> help me in
> chosing an appropriate glass substrate such that I get rid of my
> problem
>
> thank you
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
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