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MEMSnet Home: MEMS-Talk: Etching and Bonding Sapphire ...
Etching and Bonding Sapphire ...
2003-07-11
Danny Klein
2003-07-11
Mario Robles
Etching and Bonding Sapphire ...
Mario Robles
2003-07-11
Hello Danny,

You can use a dicing blade with a V-shape on the tip. The blade
thickness and angle of the bevel can be specified depending on how wide
or deep you need the groove.  We are currently supplying blade to do
this with a 22° angle, but the material is alumina ceramic.

You can contact [email protected], and he should be able to help you
find the contact person in Israel.  We represent their products in North
America, sorry.

Thank you,

Mario Robles

Tanaka Systems, Inc.
2577 Leghorn Street
Mountain View, CA 94043

650-966-8001 ofc
650-966-1881 fax
www.dicingblades.com
DICING BLADES * BACK GRIDN WHEELS * CMP PAD CONDITIONERS


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Danny Klein
Sent: Friday, July 11, 2003 5:42 AM
To: [email protected]
Subject: [mems-talk] Etching and Bonding Sapphire ...

Dear members,

I would like to etch V-grooves or rectangle microchannels on a Sapphire
plate and then bond the plate to another one.
Doe's anybody have an idea if it is possible to etch Sapphire at all and
then bond it to another one?

If it's possible, could you refer me to an article or recommend the
proper etching materials to use and the procedure for bonding the two
Sapphire plates together?

Thank you in advance,

Danny Klein.
-----------------------------------------------------

Danny Klein
Faculty of Mechanical Engineering
Technion, Israel Institute of Technology
Haifa, 32000
Israel

Tel (Lab.): 972-4-8292946(3861)
Email: [email protected]

-----------------------------------------------------

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