Anupama,

I'm interested in the details of this HF-Methanol etch.  In particular how
do you go about mixing the anhydrous HF, which is a gas at room temperature,
with the methanol?  (It sounds dangerous.)  What is the function of the
methanol?

Roger Shile

----- Original Message -----
From: 
To: "General MEMS discussion" 
Sent: Thursday, July 10, 2003 2:00 PM
Subject: Re: [mems-talk] Used equipment for HF vapor dry etch of SiO2


> Hi
>
> You dont need to buy a special tool to do the Vapor Phase
> etching of SiO2 with HF. You can use the cleaning module of
> any comercial cluster tool which are available in most
> university Nanofabs at a more reasonable rate than the
> industry.
>
> You can use a mixture of anhydrous HF & methanol. Let me
> know if you have any specific questions. I did my masters
> thesis in this area
>
> Good Luck
> Anupama
>
>
> >
> >
> > -------Original Message-------
> >
> > From: General MEMS discussion
> > Date: Wednesday, July 09, 2003 10:34:15 AM
> > To: General MEMS discussion
> > Subject: Re: [mems-talk] Used equipment for HF vapor dry
> > etch of SiO2
> >
> > ?
> > There are several options for HF vapor etching:
> >
> > 1. Pour some 49% HF into a non-glass beaker.
> > Hold the wafer over the beaker for 15 s.
> > Remove for 15 s (this prevents condensation).
> > Repeat until done, which may be an hour.
> > Variations have done using heating of the wafer.
> >
> > 2. Buy a commercial system. The only one I know is
> > the Excalibur from FSI International of Chaska, Minnesota.
> > These are relatively new, so don't count on finding a used
> > one (unless one of the dead optical-switch start-ups has
> > one).
> >
> >     --Kirt Williams, Ph.D.   consultant
> > ----- Original Message -----
> > From: Changping
> > To: [email protected]
> > Sent: Tuesday, July 08, 2003 8:12 AM
> > Subject: [mems-talk] Used equipment for HF vapor dry etch
> > of SiO2
> >
> >
> > Hi,
> >
> > I am wondering if any body know where there is such an
> > equipment for sale. What we need to do is to do SiO2
> > sacrificial etch by HF vapor. We've a limited budget so we
> > prefer an used equipment with low price.
> >
> > Thank you very much and appreciate your reply!
> >
> > Changping
> >
> >
> >
> >
> >
> >
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>
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