Hello CK,
MEMSCAP has this capability in its North Carolina MEMS fab. Please contact me if
you would like to discuss it further.

-buzz

Busbee Hardy
MEMSCAP

T-919-314-2235
M-919-641-3084
F-919-314-2204
buzz.hardy@memscap.com

www.memsrus.com
www.memscap.com

"The Power of a Small World"



-----Original Message-----
From: CK Lin [mailto:cklin@ucla.edu]
Sent: Friday, July 11, 2003 3:52 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] poly on psg


hello,

I am trying to deposit 1um polysilicon on top of a cured PSG layer.  The psg
layer will act as in situ doping source as well as sacrificial layer.  Does
anyone know of any foundry that will allow such process?

thanks for all your help.



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