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MEMSnet Home: MEMS-Talk: Seeking thick resists
Seeking thick resists
1997-10-13
Adam Cohen
Seeking thick resists
Adam Cohen
1997-10-13
Dear Colleagues,

I'm searching for information on any and all resists (or similar
photopatternable materials) that can be deposited and patterned with fairly
vertical sidewalls in a layer at least 20-25 microns thick. I have no
particular preference for negative or positive-working. The only thing I'm
familiar with is SU-8, but there must be quite a few others. Product names,
manufacturers, and phone numbers would be greatly appreciated.

Sincerely,

Adam Cohen
USC


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