A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: LAM etcher troubles
LAM etcher troubles
2003-08-01
Luckett, James T
2003-08-01
Alan D. Raisanen
2003-08-01
[email protected]
LAM etcher troubles
Luckett, James T
2003-08-01
Hi,

Do you know the actual difference between the LAM 490 Autoetch, and the LAM 590
Autoetch?  I went to the LAM vendor school in CA, and they had a model of each.
The one they said was the 590 had a Windows based touch screen CRT instead of
the traditional CRT.  Other than that, they were identical.

Other differences were upper electrodes, graphite vs. aluminum; different rated
RF generators; different power supplies in the card cage; different number of
TTL boards.

I'm interested in LAM's actual definition.

Thanks,
Jim Luckett

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Harrick Plasma, Inc.
MEMS Technology Review
Process Variations in Microsystems Manufacturing