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MEMSnet Home: MEMS-Talk: Mask Clean
Mask Clean
2003-07-31
Lin, Yaojian
2003-07-31
Mighty Platypus
2003-07-31
Hong Wu
2003-07-31
Kirt & Erika Zipf-Williams
2003-08-04
Marcus
2003-07-31
anupama@ee.washington.edu
2003-08-01
hengcw
Silicic acid for TMAH etch
2003-08-03
kris
2003-08-01
BobHendu@aol.com
Mask Clean
hengcw
2003-08-01
Hi, Here also got some clue.

You can clean your mask by using a three bath acetone cleaning with new
acetone for each bath. The length of time will not effect the mask or
chrome as a longer bath is OK>.

If there is residue that is left over from these baths they can also use a
mild liquid soap to clean off any residue that might be left.

The best way is to use a piranha of sulfuric acid, hydrogen peroxide and
water. This bath is heated up to 80 C. This will clean off all the residue.


All this cleaning method was given by Mask maker.

Heng



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