-----Original Message-----
From: hengcw [mailto:[email protected]]
Sent: Thursday, July 31, 2003 7:02 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Mask Clean


Hi, Here also got some clue.

You can clean your mask by using a three bath acetone cleaning with new
acetone for each bath. The length of time will not effect the mask or
chrome as a longer bath is OK>.

If there is residue that is left over from these baths they can also use a
mild liquid soap to clean off any residue that might be left.

The best way is to use a piranha of sulfuric acid, hydrogen peroxide and
water. This bath is heated up to 80 C. This will clean off all the residue.


All this cleaning method was given by Mask maker.

Heng



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