A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Ag-AgCl electrode
Ag-AgCl electrode
2003-08-06
Hiroaki SUZUKI
2003-08-06
Stefan Fiedler (2 parts)
2003-08-07
Jason Viotty
2003-08-07
Michael D Martin
Ag-AgCl electrode
Hiroaki SUZUKI
2003-08-06
Hi all

Has anyone tried to pattern an Ag-AgCl electrode on either glass or siliocon
substrate? I deposited and patterned Ag and immersed in chlorine based
bleach solution, but Ag easily peels off.

Although Ag-AgCl electrode is very often used for the electrical detection
of biological stuff, I don't see it in Bio-MEMS literatures. Most people use
Ti/Au or Cr/Au electrode. But in my observation, Cr as an adhesion layer
elutes when the current flows and the electrode peels off as well.

Any suggestion/discussion would help.
Thanks,

----------------------------
Hiroaki SUZUKI
The University of Tokyo
Institute of Industrial Science (IIS)
----------------------------



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Mentor Graphics Corporation
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing