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MEMSnet Home: MEMS-Talk: Su8/ Al adhesion problem
Su8/ Al adhesion problem
2003-08-06
ERIC SIMONE
2003-08-07
David Ovrokzky
Su8/ Al adhesion problem
ERIC SIMONE
2003-08-06
Hello all -

I was wondering if anyone could give me some insight on how to get better
adhesion of metal (Al in particular) to Su8. I'm evaporating a thin film
(~2000A) on top of 25-30um of Su82025. Everytime though I seem to get rather
poor adhesion. I'm using SJR 5740 to pattern the metal on top of Su8. Thank you
for your help.

Regards,
Eric Simone


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