Hi there,

wafers of excellent quality can be purchased at Wafernet Inc. Clear preference
is FZ-material with a resistivity as high as possible.

Best regards
Stephan

-----Ursprüngliche Nachricht-----
Von: John Fijol [mailto:[email protected]]
Gesendet: Dienstag, 5. August 2003 16:03
An: [email protected]
Betreff: [mems-talk] wafers for KOH etching

Hello,

   I am looking for vendors of high quality, defect free, 4" Si wafers
for KOH etching.  I am currently using CZ wafers oriented to <100>+/-
0.1 degrees, 525um+/- 0.25 um thick and a primary flat oriented to <110>
+/- 0.25 degrees.  The wafers work well most of the time, but
occasionally I encounter yield problems due to crystal defects.  I am
looking to evaluate other wafer vendors and would like any
comment/suggestions on high quality suppliers.  Also, what is your
preference (CZ vs. FZ) for KOH etching?

Thanks

John Fijol


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