Hi, I am afraid I did not ask the question correctly last time. What I am
trying to measure is the tilt angle, not rotation angle. The resolution
required is 0.0015 degree, and the range is +/-12 degree. I have checked out
some autocollimator. The resolution is good enough. However, it can not
provide enough range.

Any suggestions will be really appreciated

Thanks
Qingwei

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of [email protected]
Sent: Tuesday, August 05, 2003 5:16 PM
To: [email protected]
Subject: [mems-talk] micromirror angular rotation measurement

Hi,
I am looking for a commercially available product which can measure the
micromirror's angular rotation with a resolution of 0.015 degree. Any
suggestions?

Thanks
Qingwei



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