Try this paper:

Steinsland et.al., Sensors and Actuators A 54, 728-732, 1996.

Good luck,

Knut

Knut Lian
Process Development Engineer
Wafer Fab Technology Development
SensoNor as
PO Box 196, N-3192 Horten
Norway
Tel: +47 33 03 50 68
Fax: +47 33 03 51 05


 -----Original Message-----
From:   Raj Kumar [mailto:[email protected]]
Sent:   11. august 2003 11:56
To:     [email protected]
Subject:        [mems-talk] Boron Etch Stop Properties of TMAH


Dear MEMS Experts

       I am looking for Boron Etch Stop behaviour of Silicon in TMAH. Pl.
suggest at what Boron doping level etch rate of silicon start decreasing
in TMAH. Pl. suggest a refrences if any.

Rajkumar
SCL, India



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