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MEMSnet Home: MEMS-Talk: Thermal coefficient of expansion on SI vs orientation
Thermal coefficient of expansion on SI vs orientation
2003-08-28
Kenneth Smith
2003-08-30
Michael Barger
Thermal coefficient of expansion on SI vs orientation
Kenneth Smith
2003-08-28
Thermal coefficient of expansion on SI vs orientation

Might anyone know if there are any different Coefficients of expansion
on silicon for 1-0-0 , versus 1-1-1 versus 1-1-0 ? and does resistivity
or dopant have a play in this at all ?

Regards,.
Ken
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