Hi Kevin and all.

Kevin, you didn't specify whether only one side of the wafer needed to be
protected. If so, you can go the painful and tedious route of waxing the wafer
down to a glass plate, perhaps also using silicone adhesive ("gorilla snot")
around the edges of the wafer. As long as you keep the KOH temperature below
the wax melting point you can get pretty good protection. Removing wax and
silicone residue is a real pain.

OTOH, if you're etching on the aluminum side, never mind. Take the advice
previously given on looking into TMAH.

Reminder to all: Please include e-mail return address in the boddy of the
message for all messages to mems@ISI.EDU . Otherwise your return address
doesn't get to the mailing list members.

Cheers,
Phil
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