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MEMSnet Home: MEMS-Talk: RIE titanium etch
RIE titanium etch
2003-09-11
laurent gangloff
2003-09-11
transene
2003-09-11
Kirt & Erika Zipf-Williams
RIE titanium etch
laurent gangloff
2003-09-11
Hi all,

Does anyone know a RIE recipe to etch titanium, or titanium nitride (sputter
deposition) isotropically?

Thanks for your advices.

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