Titanium can be etched in SF6 plasma (flow rate 1 cm3/sec, 14MHz source,
10 Pa plasma conditions) or BCl3 plasma.

Transene Company (www.transene.com) offers wet etchants for titanium
either with or without compatibility with SiO2.

Christopher Christuk
Transene Company
email:  [email protected]
Tel:  978 777 7860

-----Original Message-----
From: laurent gangloff [mailto:[email protected]]
Sent: Thursday, September 11, 2003 8:48 AM
To: [email protected]
Subject: [mems-talk] RIE titanium etch

Hi all,

Does anyone know a RIE recipe to etch titanium, or titanium nitride
(sputter
deposition) isotropically?

Thanks for your advices.

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