Hi Mohamed,
BCB will not withstand the etch.
Shay

Mohamed Saadoui wrote:

> Hi,
>
> I want to use CYCLOTENE resine BCB-4000 as protective coating during silicon
> etching in pottasium hydroxide KOH at 85C, which must be removed at the end of
> processing.
>
> It will be very helpful if anyone can give information about this BCB process.
>
> Thanks and Regards,
>
> Mohamed SAADAOUI
> Laboratoire d' Analyse
> et d' Architectures Systemes
> LAAS- TOULOUSE. france
>
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