Hi,

Cyclotene website (www.cylcotene.com) has some good information regarding
curing as well as etching BCB. We followed their suggested procedure
and have reasonable success.

bala



Balaji Lakshminarayanan, Research Assistant
Microwave and Wireless Group
Electrical Engineering Department
University of South Florida
4202 E. Fowler Avenue ENB 118
Tampa, FL 33620

Phone: (813)974-3939
FAX:   (813)974-5250
email: lakshmin@eng.usf.edu
http://www.eng.usf.edu/~lakshmin

On Sun, 21 Sep 2003, Mohamed Saadoui wrote:

> Hi,
>
>
> I want to use CYCLOTENE resine BCB-4000 as protective coating during silicon
> etching in pottasium hydroxide KOH at 85C, which must be removed at the end of
> processing.
>
> It will be very helpful if anyone can give information about this BCB process.
>
> Thanks and Regards,
>
> Mohamed SAADAOUI
> Laboratoire d' Analyse
> et d' Architectures Systemes
> LAAS- TOULOUSE. france
>
>
>
>
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