A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Finding selective etchant for W and Mo
Finding selective etchant for W and Mo
2003-09-23
sajid
Finding selective etchant for W and Mo
sajid
2003-09-23
Hi Lee,

Hydrogen peroxide H2O2 might be a solution that etches W and Mo
selectively over Au and Ti. I however do not know the selectivity.

Sajid




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Addison Engineering
The Branford Group
Nano-Master, Inc.