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MEMSnet Home: MEMS-Talk: silicon dioxide deposited on metal?
silicon dioxide deposited on metal?
1997-11-12
Levent Yobas
silicon dioxide deposited on metal?
Levent Yobas
1997-11-12
I will need to put an insulating layer (not more than a micron thick)
on metal to create a dielectric effect. Right now deposition of
the insulator is only available choice for me due to lack of facility
access. The target in the deposition is pyrex.
Does anyone know which metal (e.g. gold,aliminum) is more preferrable
in terms of pyrex adhesion quality on that metal and how much thick
maximally can I deposit pyrex on that metal without creating bad adhesion
problems?

thank you
levent


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