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MEMSnet Home: MEMS-Talk: Ammonium chloride reaction with Aluminum
Ammonium chloride reaction with Aluminum
2003-09-25
Shweta Humad
Ammonium chloride reaction with Aluminum
Shweta Humad
2003-09-25
I use 5% Ammonium Chloride to wet etch a layer of ZnO. I was about to
modify the process by depositing a thin layer of aluminum before the ZnO
and was wondering if the Aluminum will get attacked by Ammonium
Chloride?

Thank you,
--
Shweta Humad
Georgia Tech, ECE Dept.






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