A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Precision holes in substrate
Precision holes in substrate
2003-09-30
Jeffery Allen
Precision holes in substrate
Jeffery Allen
2003-09-30
Hi
I am trying to make precise hole in the substrate that run all the way through
poly2 in a polymumps process. The idea is to make a hole through the stationary
part of the rotary stage. Please send me any suggestions and people I can get in
contact with for information about the same.
Thanks
Jeff
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Mentor Graphics Corporation
Harrick Plasma, Inc.
University Wafer