Yilei,

You should be able to remove the photoresist with an O2 plasma clean.

Eric Miller
Manger of Program Operations
WTC Microfabrication Laboratory
206 616-3855
[email protected] / http://microfab.watechcenter.org

----- Original Message -----
From: "Yilei Zhang" 
To: 
Sent: Thursday, October 02, 2003 3:00 PM
Subject: [mems-talk] photoresist remove


> Dear Members:
> I have some samples with photoresist (AZ5209) coating for a long time, now
i cannot
> remove it by aceton, stripper, or ultrasonic cleaner. Can anyone give me
some
> suggestions? Thanks.
>
> Regards,
> Yilei Zhang
>
>
>
>
>
>
>
>
>
>
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