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MEMSnet Home: MEMS-Talk: Si wafer bonding..
Si wafer bonding..
1997-11-11
Mehmet Arik
Si wafer bonding..
Mehmet Arik
1997-11-11
Dear MEMs researchers,

Has anyone had any experience Si wafer/wafer bonding between 500 and 700
C ? Since top wafer is very thin and some devices on it, I do not wanna
apply any weight on it.

After bonding, there should not be any liquid leakage thorugh the
bondings..

Your comments are appreciated..

Thanks.

Mehmet.


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