Glass, such as Pyrex, can be etched with SF6 in a RIE system.  A
pressure of ~70 mTorr should suffice. Chrome can be used as a mask
(photoresist may not survive, as the etch rate may be quite low.) The
optimum power is system dependent.

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
[email protected]
Sent: Tuesday, October 21, 2003 2:46 AM
To: [email protected]
Subject: [mems-talk] glass RIE etching
Importance: High

Can anyone send me some parameters and/or particular description of
glass RIE etching?


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