A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RE: Cantilever beams sticking
RE: Cantilever beams sticking
1997-11-19
Dr. Mark W. Lund
RE: Cantilever beams sticking
Dr. Mark W. Lund
1997-11-19
Ronda Irwin wrote:

Hi,

I am working with cantilever beams that have a large plate on the end that
is one-half of a parallel plate capacitor.  I  can close the capacitor
using the electrostatic pull-in voltage, but the capacitor will not
seperate when the voltage is turned off, even if the capacitors are
connected directly to gound.

Has anyone else experienced this problem and/or do you have any
suggestions.

Thanks,

Ronda Irwin


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
The Branford Group
Harrick Plasma, Inc.
Tanner EDA by Mentor Graphics