Hi everyone,

I am releatively new to this area, so hope that you don't find my question
silly.
I would like to know the typical processes or chemicals I need for silicon
carbide(SiC) etching.

thanks very much in advance.



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Chen-Han Lee
Research Student
School of Manufacturing and Mechanical Engineering,
University of Birmingham,
Birmingham, B15 2TT
United Kingdom,
Phone :  +44 121 4144245
Fax :    +44 121 4143958
E-Mail : dcl815@bham.ac.uk
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