Does any body knows a polishing house with capability of DSP Polishing for 150mm
wafers with TTV < 2 µm?

Regards,

Marcus
Siegert Consulting e.K.
Dipl.-Ing. Marcus Siegert
Ingot-, Silicon Wafer-, SOI Wafer- Specialist
Nirmer Strasse 126
D-52080 Aachen
Germany

Phone: +49/241/1689441
Fax:+49/241/1689442
Email: [email protected]
Web: www.siegertcon.de
Registergericht: Amtsgericht Aachen, HRA 4748
USt-IdNr. (VAT ID No.): DE813410651