Hello all,
I have a problem in cleaning out 1mm deep and 40um wide trenches in
continuos SU-8 layer.  Trenches that are close to the edges are clean,
while the others contain the residue that I can not remove.  I do
developing in SU-8 developer with magnetic stirring.  The use of
ultrasound damages the structure.  Does anybody know how to improve my
developing process?

Thank you very much,

Olga