I'vd been asked to post this question to the mems group,
many whom I suspect are (were) involve in the Silicon Semiconductor
fraternity [industry]:

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>From 'past experience', who is responsible for the
calibration of Metrology tools, eg Linewidth kits,
SEMs, 'Surfscans' systems, etc?

(eg, equipment eng, process technicians or porcess engs).

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Some sort of demographic response would be appreciated.

phil lau




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