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MEMSnet Home: MEMS-Talk: RIE etch for glas
RIE etch for glas
2003-11-06
PAtrick Carlberg
wet etchant for Sn and Sn oxide
2003-11-06
Robert Dean
2003-11-07
rakesh babu
2003-11-07
Mighty Platypus
2003-11-07
David Nemeth
RIE etch for glas
PAtrick Carlberg
2003-11-06
Dear all

Does anyone have a recipe for RIE on glass, with an etch rate about
100nm/min?

Patrick


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